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Rapid leakage of vacuum heat treatment furnace - yanyan - 02-04-2021

Rapid leakage of vacuum heat treatment furnace

Once during the normal process operation of a certain equipment, the vacuum degree of the heating zone of the vacuum furnace suddenly and rapidly drops. Observe that the vacuum degree of the quenching zone is basically normal and has no change. When the vacuum degree of the heating zone is lower than that of the quenching zone, the vacuum degree of the heating zone still drops, and the vacuum degree of the quenching zone is normal and has no big change. Send the equipment operator to check the heating zone on the equipment The vacuum pump works normally. The process is in the process of refilling. Immediately ask the equipment operator to check the change of the pressure gauge of the refilling tank. The pressure of the refilling tank is continuously decreasing. It is preliminarily confirmed that there may be a problem with the refilling valve. Immediately ask the operator to close the air supply valve of the tank. At this time, the vacuum degree of the heating area begins to rise, thus confirming that the refilling valve is leaking The vacuum degree of the heating zone decreases. Stand in the control room to observe the change of the instrument, send the operator to check the change of the pump and the air tank separately, and eliminate the fault within 3 minutes.

First of all, the fault of the measurement system is eliminated. The influence of the pollution of the vacuum gauge on the vacuum degree should be a slow changing process; it will not be caused by the surface deflation of the workpiece in the vacuum chamber, because it will not produce such a large amount of degassing; it must be caused by a sudden large leak. This kind of leakage usually does not occur in the static seal, but mostly in the dynamic seal. I immediately think that there are several dynamic seals in the heating zone, and which part is related to the current working state. Since it occurs in the process of re aeration in the hot zone, it is its problem. After the boiler was shut down, the valve was overhauled, which fundamentally solved the problem. Another example is the vacuum degree of quenching zone.

This equipment: the air extraction system is composed of main roughing mechanical pump and roots pump, which is connected with hot zone and cold zone at the same time. When the furnace is started, the hot zone is pumped first. When the hot zone reaches a certain vacuum degree, it is transferred to the cold zone. At this time, the air extraction system is composed of front mechanical pump and diffusion pump. Once the furnace is started, the heat extraction zone of the gas extraction system is composed of the main roughing mechanical pump and roots pump, then the cold extraction zone is changed, and the heat extraction zone of the gas extraction system is composed of the front mechanical pump and the diffusion pump. The vacuum degree of the hot zone reaches the limit vacuum degree, but the vacuum degree of the cold zone does not meet the requirements. Check that the working state of the pump is normal, and the mechanical pump is also regularly air ballasted. It is preliminarily judged that there is leakage in the cold zone, and the vacuum degree of the hot zone is normal, which indicates that it is not the problem of the middle door. If there is leakage in the middle door, the vacuum degree of the cold zone will increase instead. Because of the high vacuum degree of the hot zone, the mechanical pump will be put in front The pumping system composed of pump and diffusion pump will help the cooling area. The front door is the only part that often moves in the cold zone. It is suspected that there is a problem with the seal of the front door. Moreover, it is the easiest to check the seal of the front door, and it does not need to dismantle the equipment. It belongs to normal maintenance. After the boiler is shut down and the seal is replaced, the problem is solved.

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